发明授权
US07692278B2 Stacked-die packages with silicon vias and surface activated bonding
有权
具有硅通孔和表面激活键合的堆叠管芯封装
- 专利标题: Stacked-die packages with silicon vias and surface activated bonding
- 专利标题(中): 具有硅通孔和表面激活键合的堆叠管芯封装
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申请号: US11642293申请日: 2006-12-20
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公开(公告)号: US07692278B2公开(公告)日: 2010-04-06
- 发明人: Shanggar Periaman , Kooi Chi Ooi , Bok Eng Cheah
- 申请人: Shanggar Periaman , Kooi Chi Ooi , Bok Eng Cheah
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Buckley, Maschoff & Talwalkar LLC
- 主分类号: H01L23/31
- IPC分类号: H01L23/31 ; H01L23/48 ; H01L23/498 ; H01L23/538
摘要:
In some embodiments, an apparatus and a system are provided. The apparatus and the system may comprise a first integrated circuit die comprising a plurality of silicon vias and a first surface activated bonding site coupled to the plurality of silicon vias, and a second integrated circuit die comprising a second surface activated bonding site coupled to the first surface activated bonding site. The first surface activated bonding site may comprise a first clean metal and the second surface activated bonding site may comprise a second clean metal. If the first surface activated bonding site is coupled to the second surface activated bonding site respective metal atoms of the first activated surface activated bonding site are diffused into the second surface activated bonding site and respective metal atoms of the second activated surface activated bonding site are diffused into the first surface activated bonding site.
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