发明授权
- 专利标题: Method for producing pattern-forming body
- 专利标题(中): 图案形成体的制造方法
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申请号: US11170833申请日: 2005-06-30
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公开(公告)号: US07695887B2公开(公告)日: 2010-04-13
- 发明人: Hironori Kobayashi
- 申请人: Hironori Kobayashi
- 申请人地址: JP Tokyo-to
- 专利权人: Dai Nippon Printing Co., Ltd.
- 当前专利权人: Dai Nippon Printing Co., Ltd.
- 当前专利权人地址: JP Tokyo-to
- 代理机构: Ladas & Parry LLP
- 优先权: JP2001-318742 20011016; JP2002-182470 20020624
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; G03F7/038 ; G03F7/039 ; G03F7/20
摘要:
A method of producing a pattern-forming body with high accuracy with no need for a post-exposure treatment and without allowing any photocatalyst to remain in the resultant pattern-forming body and whereby any problematic effect of the photocatalyst in the pattern-forming body is eliminated. The method includes providing a photocatalyst-containing layer-sided substrate and a pattern-forming body substrate having a characteristic-changeable layer, which is changed by the effect of the photocatalyst in the photocatalyst-containing layer, and a light-shading part formed as a pattern in such a manner that the photocatalyst-containing layer and the characteristic-changeable layer are brought into contact with each other, followed by exposure on the side of the pattern-forming body substrate to change the characteristics of the characteristic-changeable layer of the exposed part, followed by removing the photocatalyst-containing layer-sided substrate.
公开/授权文献
- US20050238969A1 Methods for producing pattern-forming body 公开/授权日:2005-10-27
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