Invention Grant
- Patent Title: Storage nodes, phase change memory devices, and methods of manufacturing the same
- Patent Title (中): 存储节点,相变存储器件及其制造方法
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Application No.: US11907844Application Date: 2007-10-18
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Publication No.: US07696507B2Publication Date: 2010-04-13
- Inventor: Yoon-ho Khang , Ki-joon Kim , Dong-seok Suh
- Applicant: Yoon-ho Khang , Ki-joon Kim , Dong-seok Suh
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2006-0101570 20061018
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
A storage node may include a bottom electrode contact layer, a phase change layer connected to the bottom electrode contact layer, and a top electrode layer connected to the phase change layer. The bottom electrode contact layer may protrude toward the phase change layer. A phase change memory device may include a switching device and the storage node. The switching device may be connected to the bottom electrode contact layer. A method of manufacturing the storage node may include forming a via hole in an insulating interlayer, at least partially filling the via hole to form a bottom electrode contact layer, protruding the bottom electrode contact layer from the via hole, and forming a phase change layer that covers the bottom electrode contact layer. A method of manufacturing a phase change memory device may include forming the switching device on a substrate and manufacturing the storage node.
Public/Granted literature
- US20080093591A1 Storage nodes, phase change memory devices, and methods of manufacturing the same Public/Granted day:2008-04-24
Information query
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