发明授权
US07700993B2 CMOS EPROM and EEPROM devices and programmable CMOS inverters
有权
CMOS EPROM和EEPROM器件以及可编程CMOS反相器
- 专利标题: CMOS EPROM and EEPROM devices and programmable CMOS inverters
- 专利标题(中): CMOS EPROM和EEPROM器件以及可编程CMOS反相器
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申请号: US11935143申请日: 2007-11-05
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公开(公告)号: US07700993B2公开(公告)日: 2010-04-20
- 发明人: Jin Cai , Tak H. Ning , John M. Safran
- 申请人: Jin Cai , Tak H. Ning , John M. Safran
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Graham S. Jones, II; Robert M. Trepp; Louis J. Percello
- 主分类号: H01L27/092
- IPC分类号: H01L27/092
摘要:
A CMOS EPROM, EEPROM or inverter device includes an nFET device with a thin gate dielectric layer and a pFET device juxtaposed with the nFET device with a thick gate dielectric layer and a floating gate electrode. The thick gate dielectric layer is substantially thicker than the thin gate dielectric layer. A common drain node connected both FET devices has no external connection in the case of a memory device and has an external connection in the case of an inverter. There are external circuit connections to the source regions of both FET devices and to the gate electrode of the nFET device. The pFET and nFET devices can be planar, vertical or FinFET devices.
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