Invention Grant
US07703658B2 Apparatus and method for semiconductor wafer bumping via injection molded solder
失效
通过注射成型焊料的半导体晶片凸块的装置和方法
- Patent Title: Apparatus and method for semiconductor wafer bumping via injection molded solder
- Patent Title (中): 通过注射成型焊料的半导体晶片凸块的装置和方法
-
Application No.: US12056369Application Date: 2008-03-27
-
Publication No.: US07703658B2Publication Date: 2010-04-27
- Inventor: G. Gerard Gormley , Patrick Gorun , Michael Davidson
- Applicant: G. Gerard Gormley , Patrick Gorun , Michael Davidson
- Applicant Address: DE Garching/Munich
- Assignee: Suss Microtec AG
- Current Assignee: Suss Microtec AG
- Current Assignee Address: DE Garching/Munich
- Agency: AKC Patents LLC
- Agent Aliki K. Collins
- Main IPC: B23K37/06
- IPC: B23K37/06 ; B23K3/06

Abstract:
An improved apparatus for filling patterned mold cavities formed on a surface of a mold structure with solder includes an injector head assembly comprising a solder reservoir having a bottom surface with an elongated slot for injecting solder into the mold cavities and a carriage assembly configured to carry and scan the mold structure under the injector head assembly. The mold structure is brought into contact with the solder reservoir bottom surface and a seal is formed between an area of the solder reservoir bottom surface surrounding the elongated slot and the mold structure surface and then the mold structure is scanned under the injector head assembly in a first direction from a starting position to a finish position for filling the mold cavities and in a second direction opposite to the first direction for returning back from the finish position to the starting position.
Public/Granted literature
- US20080237315A1 APPARATUS AND METHOD FOR SEMICONDUCTOR WAFER BUMPING VIA INJECTION MOLDED SOLDER Public/Granted day:2008-10-02
Information query
IPC分类: