Invention Grant
- Patent Title: Mask and manufacturing method thereof
- Patent Title (中): 掩模及其制造方法
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Application No.: US11444546Application Date: 2006-05-31
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Publication No.: US07704647B2Publication Date: 2010-04-27
- Inventor: Chun-Hao Tung , Chia-Tsung Lee , Hsien-Kai Tseng , Horino Shigekazu
- Applicant: Chun-Hao Tung , Chia-Tsung Lee , Hsien-Kai Tseng , Horino Shigekazu
- Applicant Address: TW Hsinchu
- Assignee: Au Optronics Corp.
- Current Assignee: Au Optronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Priority: TW94131047A 20050909
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
A mask and a manufacturing method thereof are provided. A transparent substrate having three regions is provided first. A non-transmitting layer is formed in a first region of the transparent substrate. Then, a first photoresist layer is formed on the transparent substrate, and the first photoresist layer exposes a second region of the transparent substrate. Next, a first transmitting layer is formed on the transparent substrate and the first photoresist layer. Finally, the first photoresist layer is removed. The first transmitting layer on the first photoresist layer is removed at the same time and the first transmitting layer in the second region of the transparent substrate is remained and a third region of the transparent substrate is exposed. A lift-off process is used in the mask manufacturing method of the present invention to form the transmitting layer.
Public/Granted literature
- US20070059611A1 Mask and manufacturing method thereof Public/Granted day:2007-03-15
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