发明授权
- 专利标题: Method for the thermal treatment of disk-shaped substrates
- 专利标题(中): 盘状基板的热处理方法
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申请号: US11659587申请日: 2004-10-28
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公开(公告)号: US07704898B2公开(公告)日: 2010-04-27
- 发明人: Zsolt Nenyei , Steffen Frigge , Patrick Schmid , Thorsten Hülsmann , Thomas Theiler
- 申请人: Zsolt Nenyei , Steffen Frigge , Patrick Schmid , Thorsten Hülsmann , Thomas Theiler
- 申请人地址: US CA Fremont
- 专利权人: Mattson Technology, Inc.
- 当前专利权人: Mattson Technology, Inc.
- 当前专利权人地址: US CA Fremont
- 代理机构: Dority & Manning, P.A.
- 优先权: DE102004039443 20040813
- 国际申请: PCT/EP2004/012181 WO 20041028
- 国际公布: WO2006/015620 WO 20060216
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Disclosed is an apparatus and a method for reducing flash in an injection mold (532 or 542,543) which molds a molded article between a first mold surface and a second mold surface. The apparatus includes an active material actuator (530 or 533a and 533b or 561a and 561b) configured to, in response to application or removal of an electrical actuation signal thereto, change dimension and urge the first mold surface relative to the second mold surface to reduce flash therebetween. The apparatus also includes a transmission structure (533) configured to provide in use, the electrical actuation signal to said active material actuator (530 or 533a and 533b or 561a and 561b) includes a set of active material actuators stacked one against the other to provide a varying sealing force to urge the first mold surface relative to the second mold surface.
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