Invention Grant
- Patent Title: Sample observation method and transmission electron microscope
- Patent Title (中): 样品观察法和透射电子显微镜
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Application No.: US12119916Application Date: 2008-05-13
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Publication No.: US07705305B2Publication Date: 2010-04-27
- Inventor: Eiko Nakazawa , Hiroyuki Kobayashi
- Applicant: Eiko Nakazawa , Hiroyuki Kobayashi
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2007-128392 20070514
- Main IPC: G01N23/04
- IPC: G01N23/04

Abstract:
There is provided a transmission electron microscope capable of a capturing continuous field-of-view image without having an influence of aberration. In order to obtain an electron beam image of the whole of a predetermined range of a sample, the transmission electron microscope specifies a region with little aberration in a field of view of an image pickup device, moves a sample stage in units of the specified regions, captures the whole of the predetermined range as a plurality of continuous field-of-view images.
Public/Granted literature
- US20080283750A1 Sample Observation Method and Transmission Electron Microscope Public/Granted day:2008-11-20
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