Invention Grant
US07705305B2 Sample observation method and transmission electron microscope 有权
样品观察法和透射电子显微镜

Sample observation method and transmission electron microscope
Abstract:
There is provided a transmission electron microscope capable of a capturing continuous field-of-view image without having an influence of aberration. In order to obtain an electron beam image of the whole of a predetermined range of a sample, the transmission electron microscope specifies a region with little aberration in a field of view of an image pickup device, moves a sample stage in units of the specified regions, captures the whole of the predetermined range as a plurality of continuous field-of-view images.
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