Invention Grant
- Patent Title: Probe sensor with multi-dimensional optical grating
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Application No.: US11369574Application Date: 2006-03-07
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Publication No.: US07705999B2Publication Date: 2010-04-27
- Inventor: Zhong L. Wang , William L. Hughes , Brent A. Buchine
- Applicant: Zhong L. Wang , William L. Hughes , Brent A. Buchine
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Bockhop & Associates, LLC
- Agent Bryan W. Bockhop
- Main IPC: G01B11/14
- IPC: G01B11/14

Abstract:
A displacement sensor employs an electromagnetic radiation source that generates a beam of electromagnetic radiation for measuring a feature of an object. The displacement sensor includes a displacement probe, a multi-dimensional diffraction grating and a plurality of photon detectors. A reflection surface, which is changed when the probe interacts with the object, interacts with the beam from the electromagnetic radiation source and reflects a beam from the reflection surface. The multi-dimensional diffraction grating interacts with the reflected beam and generates a pattern of diffracted beams. Each photon detector senses a different diffracted beam, thereby providing information about the state of the probe.
Public/Granted literature
- US20080061230A1 Probe sensor with multi-dimensional optical grating Public/Granted day:2008-03-13
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