- 专利标题: Probe sensor with multi-dimensional optical grating
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申请号: US11369574申请日: 2006-03-07
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公开(公告)号: US07705999B2公开(公告)日: 2010-04-27
- 发明人: Zhong L. Wang , William L. Hughes , Brent A. Buchine
- 申请人: Zhong L. Wang , William L. Hughes , Brent A. Buchine
- 申请人地址: US GA Atlanta
- 专利权人: Georgia Tech Research Corporation
- 当前专利权人: Georgia Tech Research Corporation
- 当前专利权人地址: US GA Atlanta
- 代理机构: Bockhop & Associates, LLC
- 代理商 Bryan W. Bockhop
- 主分类号: G01B11/14
- IPC分类号: G01B11/14
摘要:
A displacement sensor employs an electromagnetic radiation source that generates a beam of electromagnetic radiation for measuring a feature of an object. The displacement sensor includes a displacement probe, a multi-dimensional diffraction grating and a plurality of photon detectors. A reflection surface, which is changed when the probe interacts with the object, interacts with the beam from the electromagnetic radiation source and reflects a beam from the reflection surface. The multi-dimensional diffraction grating interacts with the reflected beam and generates a pattern of diffracted beams. Each photon detector senses a different diffracted beam, thereby providing information about the state of the probe.
公开/授权文献
- US20080061230A1 Probe sensor with multi-dimensional optical grating 公开/授权日:2008-03-13
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