发明授权
US07706039B2 Scanner apparatus having electromagnetic radiation devices coupled to MEMS actuators
有权
具有耦合到MEMS致动器的电磁辐射装置的扫描仪装置
- 专利标题: Scanner apparatus having electromagnetic radiation devices coupled to MEMS actuators
- 专利标题(中): 具有耦合到MEMS致动器的电磁辐射装置的扫描仪装置
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申请号: US12170828申请日: 2008-07-10
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公开(公告)号: US07706039B2公开(公告)日: 2010-04-27
- 发明人: Stephen W. Smith , Kenneth L. Gentry , Jason Zara , Stephen M. Bobbio
- 申请人: Stephen W. Smith , Kenneth L. Gentry , Jason Zara , Stephen M. Bobbio
- 申请人地址: US NC Durham US NC Charlotte
- 专利权人: Duke University,University of North Carolina at Charlotte
- 当前专利权人: Duke University,University of North Carolina at Charlotte
- 当前专利权人地址: US NC Durham US NC Charlotte
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
A disclosed scanner apparatus includes a member having spaced apart proximal and distal portions. An electromagnetic radiation device is configured to direct electromagnetic radiation therefrom and is movably coupled to the distal portion of the member. The electromagnetic radiation device is configured to move in a first plane of movement to a first position to direct the electromagnetic radiation along a first path and configured to move in the plane of movement to a second position to direct the electromagnetic radiation along a second path. A MicroElectroMechanical Systems (MEMS) actuator is coupled to the electromagnetic radiation device, wherein the MEMS actuator is configured to move in a first direction to move the electromagnetic radiation device to the first position and configured to move in a second direction to move the electromagnetic radiation device to the second position. Other scanning and robotic structure devices are disclosed.