发明授权
- 专利标题: Method for producing synthetic quartz glass with predetermined hydroxyl group content
- 专利标题(中): 具有预定羟基含量的合成石英玻璃的生产方法
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申请号: US11801386申请日: 2007-05-09
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公开(公告)号: US07707855B2公开(公告)日: 2010-05-04
- 发明人: Stephan Ochs , Bodo Kuehn
- 申请人: Stephan Ochs , Bodo Kuehn
- 申请人地址: DE Hanau
- 专利权人: Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人: Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人地址: DE Hanau
- 代理机构: Tiajoloff and Kelly LLP
- 优先权: DE102006022303 20060511
- 主分类号: C03B37/018
- IPC分类号: C03B37/018
摘要:
A known method for producing synthetic quartz glass with a predetermined hydroxyl group content comprises the following steps: a porous SiO2 soot body is produced by flame hydrolysis or oxidation of a silicon-containing start compound and by layerwise deposition of SiO2 particles on a rotating support; the soot body is subjected to a dehydration treatment in a reaction gas-containing drying atmosphere at a drying temperature for removing hydroxyl groups; and the SiO2 soot body is vitrified into a body consisting of the synthetic quartz glass. Starting from this, and in order to permit a reproducible and reliable manufacture of synthetic, UV-radiation resistant quartz glass with predetermined hydroxyl group content and low chlorine content, it is suggested according to the invention that the dehydration treatment according to method step (b) comprises a drying phase during which ozone is used as the reaction gas, whereby the ozone content of the drying atmosphere is between 0.5% by vol. and 10% by vol. and the drying temperature is chosen in the range between 1200° C. and 1400° C., and whereby no halogens are supplied to the drying atmosphere.
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