发明授权
- 专利标题： Work carrier and method of processing a workpiece
- 专利标题（中）： 工作载体和加工工件的方法
-
申请号： US10729882申请日： 2003-12-05
-
公开(公告)号： US07708854B2公开(公告)日： 2010-05-04
- 发明人: Werner Kröninger , Günter Lang
- 申请人： Werner Kröninger , Günter Lang
- 申请人地址： DE Munich
- 专利权人： Infineon Technologies AG
- 当前专利权人： Infineon Technologies AG
- 当前专利权人地址： DE Munich
- 代理机构： Brinks Hofer Gilson & Lione
- 优先权： DE10260233 20021220
- 主分类号： B32B38/10
- IPC分类号： B32B38/10 ; B32B37/10 ; B32B7/12
摘要：
Explained, inter alia, is a method in which a workpiece (52) to be processed is fastened to a work carrier (10) by means of a solid (62). The work carrier (10) is made of a porous material, e.g. of porous ceramic. This processing method permits simple manipulation of the wafer during the processing. In addition, the workpiece (52) can be easily separated from the work carrier (10) using a solvent.