发明授权
US07709880B2 Field effect devices having a gate controlled via a nanotube switching element
有权
具有通过纳米管开关元件控制的栅极的场效应器件
- 专利标题: Field effect devices having a gate controlled via a nanotube switching element
- 专利标题(中): 具有通过纳米管开关元件控制的栅极的场效应器件
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申请号: US11742290申请日: 2007-04-30
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公开(公告)号: US07709880B2公开(公告)日: 2010-05-04
- 发明人: Claude L. Bertin , Thomas Rueckes , Brent M. Segal
- 申请人: Claude L. Bertin , Thomas Rueckes , Brent M. Segal
- 申请人地址: US MA Woburn
- 专利权人: Nantero, Inc.
- 当前专利权人: Nantero, Inc.
- 当前专利权人地址: US MA Woburn
- 代理机构: Wilmer Cutler Pickering Hale and Dorr LLP
- 主分类号: H01L29/78
- IPC分类号: H01L29/78
摘要:
Field effect devices having a gate controlled via a nanotube switching element. Under one embodiment, a non-volatile transistor device includes a source region and a drain region of a first semiconductor type of material and each in electrical communication with a respective terminal. A channel region of a second semiconductor type of material is disposed between the source and drain region. A gate structure is disposed over an insulator over the channel region and has a corresponding terminal. A nanotube switching element is responsive to a first control terminal and a second control terminal and is electrically positioned in series between the gate structure and the terminal corresponding to the gate structure. The nanotube switching element is electromechanically operable to one of an open and closed state to thereby open or close an electrical communication path between the gate structure and its corresponding terminal. When the nanotube switching element is in the closed state, the channel conductivity and operation of the device is responsive to electrical stimulus at the terminals corresponding to the source and drain regions and the gate structure.
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