发明授权
- 专利标题: Semiconductor device having freestanding semiconductor layer
- 专利标题(中): 具有独立半导体层的半导体器件
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申请号: US11426698申请日: 2006-06-27
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公开(公告)号: US07709892B2公开(公告)日: 2010-05-04
- 发明人: Brent A. Anderson , Edward J. Nowak , BethAnn Rainey
- 申请人: Brent A. Anderson , Edward J. Nowak , BethAnn Rainey
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Richard Kotulak Hoffman Warnick LLC
- 主分类号: H01L29/94
- IPC分类号: H01L29/94 ; H01L27/88
摘要:
A method of providing a freestanding semiconductor layer on a conventional SOI or bulk-substrate silicon device includes forming an amorphous or polycrystalline mandrel on a monocrystalline base structure. A conformal polycrystalline semiconductor layer is then formed on the mandrel and on the base structure, wherein the polycrystalline layer contacts the base structure. The polycrystalline semiconductor layer is then recrystallized so that it has a crystallinity substantially similar to that of the base structure. Thus, a freestanding semiconductor layer is formed with a high degree of control of the thickness and height thereof and maintaining a uniformity of thickness.
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