Body contacted hybrid surface semiconductor-on-insulator devices

    公开(公告)号:US08962398B2

    公开(公告)日:2015-02-24

    申请号:US13454518

    申请日:2012-04-24

    摘要: A portion of a top semiconductor layer of a semiconductor-on-insulator (SOI) substrate is patterned into a semiconductor fin having substantially vertical sidewalls. A portion of a body region of the semiconductor fin is exposed on a top surface of the semiconductor fin between two source regions having a doping of a conductivity type opposite to the body region of the semiconductor fin. A metal semiconductor alloy portion is formed directly on the two source regions and the top surface of the exposed body region between the two source regions. The doping concentration of the exposed top portion of the body region may be increased by ion implantation to provide a low-resistance contact to the body region, or a recombination region having a high-density of crystalline defects may be formed. A hybrid surface semiconductor-on-insulator (HSSOI) metal-oxide-semiconductor-field-effect-transistor (MOSFET) thus formed has a body region that is electrically tied to the source region.

    Integrated circuit structure incorporating one or more asymmetric field effect transistors as power gates for an electronic circuit with stacked symmetric field effect transistors
    4.
    发明授权
    Integrated circuit structure incorporating one or more asymmetric field effect transistors as power gates for an electronic circuit with stacked symmetric field effect transistors 有权
    集成电路结构,其包括一个或多个不对称场效应晶体管作为具有堆叠对称场效应晶体管的电子电路的功率门

    公开(公告)号:US08941180B2

    公开(公告)日:2015-01-27

    申请号:US13044872

    申请日:2011-03-10

    摘要: Disclosed is an integrated circuit having an asymmetric FET as a power gate for an electronic circuit, which has at least two stacked symmetric field effect transistors. The asymmetric FET has an asymmetric halo configuration (i.e., a single source-side halo or a source-side halo with a higher dopant concentration than a drain-side halo) and an asymmetric source/drain extension configuration (i.e., the source extension can be overlapped to a greater extent by the gate structure than the drain extension and/or the source extension can have a higher dopant concentration than the drain extension). As a result, the asymmetric FET has a low off current. In operation, the asymmetric FET is turned off when the electronic circuit is placed in a standby state and, due to the low off current (Ioff), effectively reduces standby leakage current from the electronic circuit. Additionally, avoiding the use of stacked asymmetric field effect transistors within the electronic circuit itself prevents performance degradation due to reduced linear drain current (Idlin).

    摘要翻译: 公开了具有不对称FET作为电子电路的功率门的集成电路,其具有至少两个堆叠的对称场效应晶体管。 非对称FET具有不对称的卤素配置(即,具有比漏极侧卤素更高的掺杂剂浓度的单个源极卤素或源极卤素)和非对称源极/漏极延伸配置(即,源极延伸可以 通过栅极结构比漏极延伸更大程度地重叠和/或源极延伸可以具有比漏极延伸更高的掺杂剂浓度)。 结果,不对称FET具有低截止电流。 在操作中,当电子电路处于待机状态时,不对称FET被关闭,并且由于低关断电流(Ioff),有效地减少了来自电子电路的待机漏电流。 另外,避免使用电子电路内的层叠的非对称场效应晶体管本身可以防止由于线性漏极电流(Idlin)的降低导致的性能劣化。

    Formation of multi-height MUGFET
    8.
    发明授权

    公开(公告)号:US08524546B2

    公开(公告)日:2013-09-03

    申请号:US12909919

    申请日:2010-10-22

    摘要: A method and structure comprise a field effect transistor structure that includes a first rectangular fin structure and a second rectangular fin structure, both positioned on a substrate. The sides of the second rectangular fin structure are parallel to the sides of the first rectangular fin structure. Further, a trench insulator is positioned on the substrate and positioned between a side of the first rectangular fin structure and a side of the second rectangular fin structure. A gate conductor is positioned on the trench insulator, positioned over the sides and the top of the first rectangular fin structure, and positioned over the sides and the top of the second rectangular fin structure. The gate conductor runs perpendicular to the sides of the first rectangular fin structure and the sides of the second rectangular fin structure. Also, a gate insulator is positioned between the gate conductor and the first rectangular fin structure and between the gate conductor and the second rectangular fin structure. The gate conductor is positioned adjacent to a relatively larger portion of the sides of the second rectangular fin structure and is positioned adjacent to a relatively smaller portion of the sides of the first rectangular fin structure.

    Multiple lithographic system mask shape sleeving
    9.
    发明授权
    Multiple lithographic system mask shape sleeving 有权
    多个平版印刷系统面罩形状套管

    公开(公告)号:US08518611B2

    公开(公告)日:2013-08-27

    申请号:US13007242

    申请日:2011-01-14

    IPC分类号: G03F1/68

    CPC分类号: G03F7/203 G03F1/68

    摘要: A mask fabrication method can include receiving a mask design, sending first exposure parameters to a first exposure machine, sending second exposure parameters to a second exposure machine, sending a first exposure generation command to the first machine based on the first exposure parameters and sending a second exposure generation command to the second machine based on the second exposure parameters.

    摘要翻译: 掩模制造方法可以包括接收掩模设计,将第一曝光参数发送到第一曝光机,向第二曝光机发送第二曝光参数,基于第一曝光参数向第一机器发送第一曝光生成命令,并发送 基于第二曝光参数向第二机器提供第二曝光生成命令。

    Isolation structures for global shutter imager pixel, methods of manufacture and design structures
    10.
    发明授权
    Isolation structures for global shutter imager pixel, methods of manufacture and design structures 有权
    全局快门成像器像素的隔离结构,制造方法和设计结构

    公开(公告)号:US08507962B2

    公开(公告)日:2013-08-13

    申请号:US12897230

    申请日:2010-10-04

    IPC分类号: H01L31/062

    摘要: Pixel sensor cells, e.g., CMOS optical imagers, methods of manufacturing and design structures are provided with isolation structures that prevent carrier drift to diffusion regions. The pixel sensor cell includes a photosensitive region and a gate adjacent to the photosensitive region. The pixel sensor cell further includes a diffusion region adjacent to the gate. The pixel sensor cell further includes an isolation region located below a channel region of the gate and about the photosensitive region, which prevents electrons collected in the photosensitive region to drift to the diffusion region.

    摘要翻译: 像素传感器单元,例如CMOS光学成像器,制造和设计结构的方法被提供有防止载流子漂移到扩散区域的隔离结构。 像素传感器单元包括感光区域和与感光区域相邻的栅极。 像素传感器单元还包括与栅极相邻的扩散区域。 像素传感器单元还包括位于栅极的沟道区域周围和感光区域下方的隔离区域,其防止在光敏区域中收集的电子漂移到扩散区域。