发明授权
- 专利标题: Position measuring arrangement
- 专利标题(中): 位置测量装置
-
申请号: US11900268申请日: 2007-09-11
-
公开(公告)号: US07710578B2公开(公告)日: 2010-05-04
- 发明人: Karsten Sändig , Wolfgang Holzapfel
- 申请人: Karsten Sändig , Wolfgang Holzapfel
- 申请人地址: DE Traunreut
- 专利权人: Dr. Johannes Heidenhain GmbH
- 当前专利权人: Dr. Johannes Heidenhain GmbH
- 当前专利权人地址: DE Traunreut
- 代理机构: Brinks Hofer Gilson & Lione
- 优先权: DE102006042743 20060912
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
A position measuring arrangement for detecting a relative position is disclosed. The position measuring arrangement includes a reflection scale graduation and a scanning unit having a plurality of optical elements. The plurality of optical elements includes a combining grating, a retro-reflector element, a scanning grating and detector elements. The optical elements are arranged so that light beams and/or partial light beams of a scanning beam path act on the reflection scale graduation at least twice; a directional reversal of the incident partial light beams impinging on the reflection scale graduation perpendicularly with respect to the measuring direction takes place by the retro-reflector element; and a pair of partial light beams impinges in a non-parallel manner on the combining grating, and the combining grating brings the partial light beams impinging on the combining grating to interference, so that phase-shifted signals are detected by the plurality of detector elements.
公开/授权文献
- US20080062432A1 Position measuring arrangement 公开/授权日:2008-03-13
信息查询