发明授权
US07712206B2 Method for manufacturing a magnetic write head having a trailing shield with an accurately controlled trailing shield gap thickness
有权
一种制造具有后挡板的磁写头的方法,其具有精确控制的后屏蔽间隙厚度
- 专利标题: Method for manufacturing a magnetic write head having a trailing shield with an accurately controlled trailing shield gap thickness
- 专利标题(中): 一种制造具有后挡板的磁写头的方法,其具有精确控制的后屏蔽间隙厚度
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申请号: US11439297申请日: 2006-05-22
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公开(公告)号: US07712206B2公开(公告)日: 2010-05-11
- 发明人: Ming Jiang , Aron Pentek , Yi Zheng
- 申请人: Ming Jiang , Aron Pentek , Yi Zheng
- 申请人地址: NL Amsterdam
- 专利权人: Hitachi Global Storage Technologies Netherlands B.V.
- 当前专利权人: Hitachi Global Storage Technologies Netherlands B.V.
- 当前专利权人地址: NL Amsterdam
- 代理机构: Zilka-Kotab, PC
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H01R31/00
摘要:
A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.
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