Invention Grant
- Patent Title: Method and device of forming a piezo-electric film
- Patent Title (中): 形成压电薄膜的方法和装置
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Application No.: US11179667Application Date: 2005-07-13
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Publication No.: US07713588B2Publication Date: 2010-05-11
- Inventor: Motohiro Yasui
- Applicant: Motohiro Yasui
- Applicant Address: JP
- Assignee: Brother Kogyo Kabushiki Kaisha
- Current Assignee: Brother Kogyo Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Banner & Witcoff, Ltd.
- Priority: JP2004-206086 20040713
- Main IPC: B05D1/02
- IPC: B05D1/02 ; B05D5/12 ; B21D53/76 ; B05D3/12

Abstract:
A piezo-electric film forming method includes (1) a first moving step of moving a nozzle with respect to a substrate along a first direction to form a first piezo-electric band extending along the first direction, (2) a measuring step of measuring thickness distribution along the width of the first piezo-electric band, (3) a calculating step of calculating a shifting distance based on the thickness distribution, (4) a shifting step of moving the nozzle with respect to the substrate along a second direction by the calculated shifting distance, wherein the second direction intersects with the first direction, and (5) a second moving step of moving the nozzle with respect to the substrate along the first direction to form a second piezo-electric band extending along the first direction. The piezo-electric film is formed such that the first piezo-electric band and the second piezo-electric band are overlapped.
Public/Granted literature
- US20060010687A1 Method and device of forming a piezo-electric film Public/Granted day:2006-01-19
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