发明授权
- 专利标题: Integrated circuits and methods of manufacturing thereof
- 专利标题(中): 集成电路及其制造方法
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申请号: US11737617申请日: 2007-04-19
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公开(公告)号: US07714377B2公开(公告)日: 2010-05-11
- 发明人: Michael Specht , Nicolas Nagel , Franz Hofmann , Thomas Mikolajick
- 申请人: Michael Specht , Nicolas Nagel , Franz Hofmann , Thomas Mikolajick
- 申请人地址: DE Munich DE Dresden
- 专利权人: Qimonda AG,Qimonda Flash GmbH
- 当前专利权人: Qimonda AG,Qimonda Flash GmbH
- 当前专利权人地址: DE Munich DE Dresden
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
Embodiments of the invention relate to integrated circuits having a memory cell arrangement and methods of manufacturing thereof. In one embodiment of the invention, an integrated circuit has a memory cell arrangement which includes a fin structure extending in its longitudinal direction as a first direction, including a first insulating layer, a first active region disposed above the first insulating layer, a second insulating layer disposed above the first active region, a second active region disposed above the second insulating layer, a charge storage layer structure disposed at least next to at least one sidewall of the fin structure covering at least a portion of the first active region and at least a portion of the second active region, and a control gate disposed next to the charge storage layer structure.
公开/授权文献
- US20080259687A1 Integrated Circuits and Methods of Manufacturing Thereof 公开/授权日:2008-10-23
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