Invention Grant
- Patent Title: Semiconductor device and method of producing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12265430Application Date: 2008-11-05
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Publication No.: US07719078B2Publication Date: 2010-05-18
- Inventor: Kazuo Tomita
- Applicant: Kazuo Tomita
- Applicant Address: JP Tokyo
- Assignee: Renesas Technology Corp.
- Current Assignee: Renesas Technology Corp.
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP1999-355645 19991215
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
In a semiconductor device having element isolation made of a trench-type isolating oxide film 13, large and small dummy patterns 11 of two types, being an active region of a dummy, are located in an isolating region 10, the large dummy patterns 11b are arranged at a position apart from actual patterns 9, and the small dummy patterns 11a are regularly arranged in a gap at around a periphery of the actual patterns 9, whereby uniformity of an abrading rate is improved at a time of abrading an isolating oxide film 13a is improved, and surface flatness of the semiconductor device becomes preferable.
Public/Granted literature
- US20090072345A1 SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME Public/Granted day:2009-03-19
Information query
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