发明授权
- 专利标题: Electrostatic actuator and controller with PWM driving
- 专利标题(中): 带PWM驱动的静电执行器和控制器
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申请号: US11397717申请日: 2006-04-05
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公开(公告)号: US07719162B2公开(公告)日: 2010-05-18
- 发明人: Dong-ki Min , Jin-ho Lee , Seung-bum Hong
- 申请人: Dong-ki Min , Jin-ho Lee , Seung-bum Hong
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2005-0029079 20050407
- 主分类号: H02N1/00
- IPC分类号: H02N1/00 ; G02B26/08
摘要:
An electrostatic actuator and a method of driving the same are provided. The actuator controls the displacement of a target object by adjusting a voltage between fixed comb electrodes and a moving comb electrode. The actuator includes an actuator control signal generator generating an actuator control signal by pulse-width modulating an actuator driving signal and a carrier signal; and an actuator unit including the fixed comb electrodes and the moving comb electrode and adjusting the voltage according to the actuator control signal. Accordingly, the displacement can be easily controlled using the pulse-width-modulated actuator driving signal even when both the voltage of the actuator driving signal and the frequency of the carrier signal are high.
公开/授权文献
- US20060226733A1 Actuator and method of driving the same 公开/授权日:2006-10-12
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