发明授权
- 专利标题: Techniques for optical ion beam metrology
- 专利标题(中): 光离子束计量技术
-
申请号: US11859219申请日: 2007-09-21
-
公开(公告)号: US07723697B2公开(公告)日: 2010-05-25
- 发明人: Alexander S. Perel , Wilhelm Platow , Craig Chaney , Frank Sinclair , Tyler Rockwell
- 申请人: Alexander S. Perel , Wilhelm Platow , Craig Chaney , Frank Sinclair , Tyler Rockwell
- 申请人地址: US MA Gloucester
- 专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址: US MA Gloucester
- 主分类号: G01K11/00
- IPC分类号: G01K11/00 ; G21K5/02 ; G21K5/10
摘要:
Techniques for providing optical ion beam metrology are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for controlling beam density profile, the apparatus may include one or more camera systems to capture at least one image of an ion beam and a control system coupled to the one or more camera systems to control a beam density profile of the ion beam. The control system may further include a dose profiler to provide information to one or more ion implantation components in at least one of a feedback loop and a feedforward loop to improve dose and angle uniformity.
公开/授权文献
- US20090078883A1 TECHNIQUES FOR OPTICAL ION BEAM METROLOGY 公开/授权日:2009-03-26
信息查询