发明授权
- 专利标题: Method of forming a chalcogenide compound target
- 专利标题(中): 形成硫属化物化合物靶的方法
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申请号: US11860931申请日: 2007-09-25
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公开(公告)号: US07727458B2公开(公告)日: 2010-06-01
- 发明人: Yong-Ho Ha , Bong-Jin Kuh , Han-Bong Ko , Doo-Hwan Park , Sang-Wook Lim , Hee-Ju Shin
- 申请人: Yong-Ho Ha , Bong-Jin Kuh , Han-Bong Ko , Doo-Hwan Park , Sang-Wook Lim , Hee-Ju Shin
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, PA
- 优先权: KR10-2006-0094217 20060927
- 主分类号: C04B35/64
- IPC分类号: C04B35/64
摘要:
In a method of forming a chalcogenide compound target, a first powder including germanium carbide or germanium is prepared, and a second powder including antimony carbide or antimony is prepared. A third powder including tellurium carbide or tellurium is prepared. A powder mixture is formed by mixing the first to the third powders. After a shaped is formed body by molding the powder mixture. The chalcogenide compound target is obtained by sintering the powder mixture. The chalcogenide compound target may include a chalcogenide compound that contains carbon and metal, or carbon, metal and nitrogen considering contents of carbon, metal and nitrogen, so that a phase-change material layer formed using the chalcogenide compound target may stable phase transition, enhanced crystallized temperature and increased resistance. A phase-change memory device including the phase-change material layer may have reduced set resistance and driving current while improving durability and sensing margin.
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