发明授权
- 专利标题: Probe system comprising an electric-field-aligned probe tip and method for fabricating the same
- 专利标题(中): 包括电场对准探针尖端的探针系统及其制造方法
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申请号: US12088223申请日: 2006-10-10
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公开(公告)号: US07735147B2公开(公告)日: 2010-06-08
- 发明人: Sungho Jin , Li-Han Chen , I-Chen Chen
- 申请人: Sungho Jin , Li-Han Chen , I-Chen Chen
- 申请人地址: US CA Oakland
- 专利权人: The Regents of the University of California
- 当前专利权人: The Regents of the University of California
- 当前专利权人地址: US CA Oakland
- 代理机构: Lewis Brisbols Bisgaard & Smith LLP
- 代理商 Sanford Astor
- 国际申请: PCT/US2006/039824 WO 20061010
- 国际公布: WO2007/047337 WO 20070426
- 主分类号: H01J37/06
- IPC分类号: H01J37/06
摘要:
A mechanically stable and oriented scanning probe tip comprising a carbon nanotube having a base with gradually decreasing diameter, with a sharp tip at the probe tip. Such a tip or an array of tips is produced by depositing a catalyst metal film on a substrate (10 & 12 in FIG. 1(a)), depositing a carbon dot (14 in FIG. 1(b)) on the catalyst metal film, etching away the catalyst metal film (FIG. 1(c)) not masked by the carbon dot, removing the carbon dot from the catalyst metal film to expose the catalyst metal film (FIG. 1(d)), and growing a carbon nanotube probe tip on the catalyst film (16 in FIG. 1(e)). The carbon probe tips can be straight, angled, or sharply bent and have various technical applications.