- 专利标题: Methods and systems for semiconductor testing using reference dice
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申请号: US12346129申请日: 2008-12-30
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公开(公告)号: US07737716B2公开(公告)日: 2010-06-15
- 发明人: Gil Balog
- 申请人: Gil Balog
- 申请人地址: IL Nes-Zionna
- 专利权人: OptimalTest Ltd.
- 当前专利权人: OptimalTest Ltd.
- 当前专利权人地址: IL Nes-Zionna
- 代理机构: Occhiuti Rohlicek & Tsao LLP
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
Methods and systems of semiconductor testing where reference dice and non-reference dice in a wafer and/or lot are tested differently. In one embodiment of the invention, geography, lithography exposure, other characteristics, performance and/or behavior are taken into account when selecting reference dice, thereby improving the likelihood that the response of reference dice to testing is well representative of the wafer and/or lot. In one embodiment, based on data from the testing of reference dice, the test flow for non-reference dice and/or other testing may or may not be adjusted.
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