发明授权
US07741197B1 Systems and methods for harvesting and reducing contamination in nanowires
有权
用于收获和减少纳米线污染的系统和方法
- 专利标题： Systems and methods for harvesting and reducing contamination in nanowires
- 专利标题（中）： 用于收获和减少纳米线污染的系统和方法
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申请号： US11643025申请日： 2006-12-20
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公开(公告)号： US07741197B1公开(公告)日： 2010-06-22
- 发明人: Xiangfeng Duan , Paul Bernatis , Alice Fischer-Colbrie , James M. Hamilton , Francesco Lemmi , Yaoling Pan , J. Wallace Parce , Cheri X. Y. Pereira , David P. Stumbo
- 申请人： Xiangfeng Duan , Paul Bernatis , Alice Fischer-Colbrie , James M. Hamilton , Francesco Lemmi , Yaoling Pan , J. Wallace Parce , Cheri X. Y. Pereira , David P. Stumbo
- 申请人地址： US CA Palo Alto
- 专利权人： Nanosys, Inc.
- 当前专利权人： Nanosys, Inc.
- 当前专利权人地址： US CA Palo Alto
- 代理商 Andrew L. Filler
- 主分类号： H01L21/20
- IPC分类号： H01L21/20 ; H01L21/36
摘要：
The present invention is directed to methods to harvest, integrate and exploit nanomaterials, and particularly elongated nanowire materials. The invention provides methods for harvesting nanowires that include selectively etching a sacrificial layer placed on a nanowire growth substrate to remove nanowires. The invention also provides methods for integrating nanowires into electronic devices that include placing an outer surface of a cylinder in contact with a fluid suspension of nanowires and rolling the nanowire coated cylinder to deposit nanowires onto a surface. Methods are also provided to deposit nanowires using an ink-jet printer or an aperture to align nanowires. Additional aspects of the invention provide methods for preventing gate shorts in nanowire based transistors. Additional methods for harvesting and integrating nanowires are provided.