发明授权
- 专利标题: Precision laser machining apparatus
- 专利标题(中): 精密激光加工设备
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申请号: US12340023申请日: 2008-12-19
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公开(公告)号: US07742212B2公开(公告)日: 2010-06-22
- 发明人: Michael J. Scaggs , Thomas Schoelzel
- 申请人: Michael J. Scaggs , Thomas Schoelzel
- 申请人地址: US FL Weston
- 专利权人: Michael J. Scaggs
- 当前专利权人: Michael J. Scaggs
- 当前专利权人地址: US FL Weston
- 代理机构: Smith & Hopen, P.A.
- 代理商 Ronald E. Smith
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
A focused laser beam having an optical axis passes sequentially through a simple, positive lens, a pair of plane, parallel windows, and a second, simple, negative lens. Each of the plane, parallel windows are mounted to a galvanometer motor and positioned orthogonally to one another. The focused laser beam is therefore displaced in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. A field size of one thousand microns is achieved.
公开/授权文献
- US20090095721A1 PRECISION LASER MACHINING APPARATUS 公开/授权日:2009-04-16
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