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公开(公告)号：US20080192322A1
公开(公告)日：2008-08-14
申请号：US11674730
申请日：2007-02-14
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/105
摘要： A focused laser beam having an optical axis passes through a first lens mounted to a first galvanometer and a second lens mounted to a second galvanometer. The first galvanometer is adapted to tilt the first lens about a X axis and the second galvanometer is adapted to tilt the second lens about a Y axis. This displaces the focused laser beam in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. In a preferred embodiment, the first and second lenses are a pair of inverted positive meniscus lenses, of high index of refraction material.
摘要翻译： 具有光轴的聚焦激光束通过安装到第一电流计的第一透镜和安装到第二电流计的第二透镜。 第一电流计适于使第一透镜围绕X轴倾斜，并且第二电流计适于使第二透镜围绕Y轴倾斜。 这使得聚焦的激光束以受控的方式从光轴移位，使得能够在大的处理窗口上激光加工非常精确的几何特征。 在优选实施例中，第一透镜和第二透镜是高折射率材料的一对反向正弯月形透镜。
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公开(公告)号：US07742212B2
公开(公告)日：2010-06-22
申请号：US12340023
申请日：2008-12-19
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/105
摘要： A focused laser beam having an optical axis passes sequentially through a simple, positive lens, a pair of plane, parallel windows, and a second, simple, negative lens. Each of the plane, parallel windows are mounted to a galvanometer motor and positioned orthogonally to one another. The focused laser beam is therefore displaced in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. A field size of one thousand microns is achieved.
摘要翻译： 具有光轴的聚焦激光束依次通过简单的正透镜，一对平面，平行的窗口和第二简单的负透镜。 每个平面平行窗口都安装在电流计电机上并且彼此正交定位。 因此，聚焦的激光束以受控的方式从光轴移位，使得能够在大的处理窗口上激光加工非常精确的几何特征。 实现了一千微米的场尺寸。
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公开(公告)号：US07529010B1
公开(公告)日：2009-05-05
申请号：US12190273
申请日：2008-08-12
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/105
摘要： A focused laser beam having an optical axis passes through a first lens mounted to a first galvanometer and a second lens mounted to a second galvanometer. The first galvanometer is adapted to tilt the first lens about a X axis and the second galvanometer is adapted to tilt the second lens about a Y axis. This displaces the focused laser beam in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. In a preferred embodiment, the first and second lenses are a pair of inverted positive meniscus lenses, of high index of refraction material.
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公开(公告)号：US20090095721A1
公开(公告)日：2009-04-16
申请号：US12340023
申请日：2008-12-19
IPC分类号： B23K26/38
CPC分类号： G02B26/101 , G02B26/105
摘要： A focused laser beam having an optical axis passes sequentially through a simple, positive lens, a pair of plane, parallel windows, and a second, simple, negative lens. Each of the plane, parallel windows are mounted to a galvanometer motor and positioned orthogonally to one another. The focused laser beam is therefore displaced in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. A field size of one thousand microns is achieved.
摘要翻译： 具有光轴的聚焦激光束依次通过简单的正透镜，一对平面，平行的窗口和第二简单的负透镜。 每个平面平行窗口都安装在电流计电机上并且彼此正交定位。 因此，聚焦的激光束以受控的方式从光轴移位，使得能够在大的处理窗口上激光加工非常精确的几何特征。 实现了一千微米的场尺寸。
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公开(公告)号：US07489429B2
公开(公告)日：2009-02-10
申请号：US11674730
申请日：2007-02-14
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/105
摘要： A focused laser beam having an optical axis passes through a first lens mounted to a first galvanometer and a second lens mounted to a second galvanometer. The first galvanometer is adapted to tilt the first lens about a X axis and the second galvanometer is adapted to tilt the second lens about a Y axis. This displaces the focused laser beam in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. In a preferred embodiment, the first and second lenses are a pair of inverted positive meniscus lenses, of high index of refraction material.
摘要翻译： 具有光轴的聚焦激光束通过安装到第一电流计的第一透镜和安装到第二电流计的第二透镜。 第一电流计适于使第一透镜围绕X轴倾斜，并且第二电流计适于使第二透镜围绕Y轴倾斜。 这使得聚焦的激光束以受控的方式从光轴移位，使得能够在大的处理窗口上激光加工非常精确的几何特征。 在优选实施例中，第一透镜和第二透镜是高折射率材料的一对反向正弯月形透镜。
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公开(公告)号：US20110249256A1
公开(公告)日：2011-10-13
申请号：US12756476
申请日：2010-04-08
申请人： Michael J. Scaggs
发明人： Michael J. Scaggs
IPC分类号： G01J1/16
CPC分类号： G01J1/4257 , B23K26/705 , G01J1/04 , G01J1/0418 , G02B27/106 , G02B27/108 , G02B27/144
摘要： An apparatus that enables real time measurement of the spatial profile, circularity, centroid, astigmatism and M2 values of a laser beam generated by a high power laser beam. The apparatus employs the optics used in a process application, including a focus lens and cover glass. An attenuation module includes a pair of high reflecting mirror plates disposed in parallel, spaced apart relation to one another at a common angle of incidence to the laser beam. A beam dump is positioned out of a path of travel of the laser beam and in receiving relation to light reflected by the first and second mirrors. A camera detects spots of light that pass through the first and second mirrors. A high power attenuator formed by a highly reflective mirror pair is positioned between the source and the attenuation module. A second embodiment includes a single mirror plate having highly reflective surfaces.
摘要翻译： 能够对由高功率激光束产生的激光束的空间分布，圆度，重心，像散和M2值进行实时测量的装置。 该装置采用在工艺应用中使用的光学元件，包括聚焦透镜和盖玻璃。 衰减模块包括一对平行设置的高反射镜板，以与激光束的共同入射角相互间隔开。 光束转台位于激光束的行进路径之外并且接收与由第一和第二反射镜反射的光的关系。 相机检测通过第一和第二反射镜的光点。 由高反射镜对形成的高功率衰减器位于源极与衰减模块之间。 第二实施例包括具有高反射表面的单个反射镜板。
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公开(公告)号：US07944624B2
公开(公告)日：2011-05-17
申请号：US11847013
申请日：2007-08-29
申请人： Michael J. Scaggs
发明人： Michael J. Scaggs
CPC分类号： G02B5/001 , G02B19/0009 , G02B19/0014 , G02B19/0052 , G02B19/0095 , G02B27/0972
摘要： A method of homogenizing light includes the steps of providing a plurality of large diameter lenses selected from a group of lenses consisting of positive or negative spherical, positive or negative cylindrical lenses and positive or negative axicons, selecting a predetermined number of lenses from the group of lenses, segmenting each selected lens in a manner common to all selected lenses, selecting from each lens a predetermined number of lens segments, and arranging the selected lens segments in a predetermined array so that the light passing through each lens segment, when arranged in the predetermined array, recombines at a common plane.
摘要翻译： 均匀化光的方法包括以下步骤：提供多个大直径透镜，其从由正或负球面，正或负柱面透镜和正或负轴突组成的一组透镜中选择，从一组透镜中选择预定数量的透镜 透镜，以所有选择的透镜共同的方式分割每个所选择的透镜，从每个透镜选择预定数量的透镜段，并且将所选择的透镜段布置成预定阵列，使得当布置在所述透镜段中时，穿过每个透镜段的光 预定阵列在公共平面上重组。
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公开(公告)号：US20090059394A1
公开(公告)日：2009-03-05
申请号：US11847013
申请日：2007-08-29
申请人： Michael J. Scaggs
发明人： Michael J. Scaggs
IPC分类号： G02B3/08
CPC分类号： G02B5/001 , G02B19/0009 , G02B19/0014 , G02B19/0052 , G02B19/0095 , G02B27/0972
摘要： A method of homogenizing light includes the steps of providing a plurality of large diameter lenses selected from a group of lenses consisting of positive or negative spherical, positive or negative cylindrical lenses and positive or negative axicons, selecting a predetermined number of lenses from the group of lenses, segmenting each selected lens in a manner common to all selected lenses, selecting from each lens a predetermined number of lens segments, and arranging the selected lens segments in a predetermined array so that the light passing through each lens segment, when arranged in the predetermined array, recombines at a common plane.
摘要翻译： 均匀化光的方法包括以下步骤：提供多个大直径透镜，其从由正或负球面，正或负柱面透镜和正或负轴突组成的一组透镜中选择，从一组透镜中选择预定数量的透镜 透镜，以所有选择的透镜共同的方式分割每个所选择的透镜，从每个透镜选择预定数量的透镜段，并且将所选择的透镜段布置成预定阵列，使得当布置在所述透镜段中时，穿过每个透镜段的光 预定阵列在公共平面上重组。
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公开(公告)号：US08427633B1
公开(公告)日：2013-04-23
申请号：US13481288
申请日：2012-05-25
申请人： Michael J. Scaggs
发明人： Michael J. Scaggs
IPC分类号： G01J1/00
CPC分类号： G01J1/4257 , B23K26/705 , G01J1/04 , G01J1/0418 , G02B27/106 , G02B27/108 , G02B27/144
摘要： An apparatus that enables real time measurement of the spatial profile, circularity, centroid, astigmatism and M2 values of a laser beam generated by a high power laser beam. The apparatus employs the optics used in a process application, including a focus lens and cover glass. An attenuation module includes a pair of high reflecting mirror plates disposed in parallel, spaced apart relation to one another at a common angle of incidence to the laser beam. A beam dump is positioned out of a path of travel of the laser beam and in receiving relation to light reflected by the first and second mirrors. A camera detects spots of light that pass through the first and second mirrors. A high power attenuator formed by a highly reflective mirror pair is positioned between the source and the attenuation module. A second embodiment includes a single mirror plate having highly reflective surfaces.
摘要翻译： 能够对由高功率激光束产生的激光束的空间分布，圆度，重心，像散和M2值进行实时测量的装置。 该装置采用在工艺应用中使用的光学元件，包括聚焦透镜和盖玻璃。 衰减模块包括一对平行设置的高反射镜板，以与激光束的共同入射角相互间隔开。 光束转台位于激光束的行进路径之外并且接收与由第一和第二反射镜反射的光的关系。 相机检测通过第一和第二反射镜的光点。 由高反射镜对形成的高功率衰减器位于源极与衰减模块之间。 第二实施例包括具有高反射表面的单个反射镜板。
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10.发明授权157 nm laser system and method for multi-layer semiconductor failure analysis 失效157 nm激光系统和多层半导体故障分析方法公开(公告)号：US06795456B2
公开(公告)日：2004-09-21
申请号：US09733874
申请日：2000-12-08
申请人： Michael J. Scaggs
发明人： Michael J. Scaggs
IPC分类号： H05B700
CPC分类号： H01S3/223 , B23K26/40 , B23K2101/40 , B23K2103/16 , B23K2103/50 , G01N1/32 , G01N21/718 , G01N21/9501 , G01R31/2851 , H01L21/56 , H01L2924/0002 , H01L2924/00
摘要： A failure analysis system and method for multi-layer semiconductor devices, including a molecular fluorine laser system for producing a 157 nm beam and an imaging system for imaging the beam onto the semiconductor device. The laser beam etches away one or more top (passivation) layers to expose layers disposed underneath. Circuitry formed in exposed layers can then be tested.
摘要翻译： 一种用于多层半导体器件的故障分析系统和方法，包括用于产生157nm光束的分子氟激光系统和用于将光束成像到半导体器件上的成像系统。 激光束蚀刻掉一个或多个顶部（钝化）层以暴露位于其下的层。 然后可以测试在暴露层中形成的电路。
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