发明授权
- 专利标题: Method of making three dimensional NAND memory
- 专利标题(中): 制作三维NAND存储器的方法
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申请号: US11691885申请日: 2007-03-27
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公开(公告)号: US07745265B2公开(公告)日: 2010-06-29
- 发明人: Nima Mokhlesi , Roy Scheuerlein
- 申请人: Nima Mokhlesi , Roy Scheuerlein
- 申请人地址: US CA Milpitas
- 专利权人: Sandisk 3D, LLC
- 当前专利权人: Sandisk 3D, LLC
- 当前专利权人地址: US CA Milpitas
- 代理机构: Foley & Lardner LLP
- 主分类号: H01L21/82
- IPC分类号: H01L21/82
摘要:
A method of making a monolithic, three dimensional NAND string, includes forming a select transistor, forming a first memory cell over a second memory cell, forming a first word line for the first memory cell, forming a second word line for the second memory cell, forming a bit line, forming a source line, and forming a select gate line for the select transistor. The first and the second word lines are not parallel to the bit line, and the first and the second word lines extend parallel to at least one of the source line and the select gate line.
公开/授权文献
- US20080242008A1 METHOD OF MAKING THREE DIMENSIONAL NAND MEMORY 公开/授权日:2008-10-02
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