发明授权
US07745265B2 Method of making three dimensional NAND memory 有权
制作三维NAND存储器的方法

Method of making three dimensional NAND memory
摘要:
A method of making a monolithic, three dimensional NAND string, includes forming a select transistor, forming a first memory cell over a second memory cell, forming a first word line for the first memory cell, forming a second word line for the second memory cell, forming a bit line, forming a source line, and forming a select gate line for the select transistor. The first and the second word lines are not parallel to the bit line, and the first and the second word lines extend parallel to at least one of the source line and the select gate line.
公开/授权文献
信息查询
0/0