发明授权
- 专利标题: Manufacturing method of opto-electric hybrid board and opto-electric hybrid board obtained thereby
- 专利标题(中): 由此获得光电混合板和光电混合板的制造方法
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申请号: US12358528申请日: 2009-01-23
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公开(公告)号: US07747123B2公开(公告)日: 2010-06-29
- 发明人: Takami Hikita , Kazunori Mune , Toshiki Naitou , Yasunari Ooyabu
- 申请人: Takami Hikita , Kazunori Mune , Toshiki Naitou , Yasunari Ooyabu
- 申请人地址: JP Osaka
- 专利权人: Nitto Denko Corporation
- 当前专利权人: Nitto Denko Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 优先权: JP2008-013874 20080124
- 主分类号: G02B6/12
- IPC分类号: G02B6/12 ; G02B6/10 ; B29D11/00
摘要:
A method of manufacturing an opto-electric hybrid board which is capable of reducing the number of steps for the manufacture of the opto-electric hybrid board and which achieves the reduction in thickness of the opto-electric hybrid board to be manufactured, and an opto-electric hybrid board obtained thereby. A resist layer is formed on a core-forming resin layer, and is then formed into a predetermined pattern. Resultant portions of the core-forming resin layer serve as cores (optical interconnect lines) 3. Next, a thin metal film 5 is formed on the under cladding layer 2 so as to cover the resist layer and the cores 3. Thereafter, the resist layer is removed together with portions of the thin metal film 5 lying on the surface of the resist layer. Electroplating is performed on the remaining portions of the thin metal film 5 to fill grooves 6 defined between adjacent ones of the cores 3 with electroplated layers 7a obtained by the electroplating. The electroplated layers 7a serve as electrical interconnect lines 7.
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