发明授权
- 专利标题: Method of fabricating vertical body-contacted SOI transistor
- 专利标题(中): 垂直体接触SOI晶体管的制造方法
-
申请号: US12002828申请日: 2007-12-19
-
公开(公告)号: US07759188B2公开(公告)日: 2010-07-20
- 发明人: Kangguo Cheng , Gary B. Bronner , Ramachandra Divakaruni , Carl J. Radens
- 申请人: Kangguo Cheng , Gary B. Bronner , Ramachandra Divakaruni , Carl J. Radens
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Joseph P. Abate; Daryl K. Neff
- 主分类号: H01L21/8242
- IPC分类号: H01L21/8242
摘要:
A method of fabricating a vertical field effect transistor (“FET”) is provided which includes a transistor body region and source and drain regions disposed in a single-crystal semiconductor-on-insulator (“SOI”) region of a substrate adjacent a sidewall of a trench. The substrate includes a buried insulator layer underlying the SOI region and a bulk region underlying the buried insulator layer. A buried strap conductively connects the SOI region to a lower node disposed below the SOI region and a body contact extends from the transistor body region to the bulk region of the substrate, the body contact being insulated from the buried strap.