Invention Grant
- Patent Title: Silicon photoelectric multiplier (variants) and a cell for silicon photoelectric multiplier
- Patent Title (中): 硅光电倍增器(变体)和硅光电倍增器单元
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Application No.: US11568646Application Date: 2005-05-05
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Publication No.: US07759623B2Publication Date: 2010-07-20
- Inventor: Masahiro Teshima , Razmik Mirzoyan , Boris Anatolievich Dolgoshein , Sergey Nikolaevich Klemin , Elena Viktorovna Popova , Leonid Anatolievich Filatov
- Applicant: Masahiro Teshima , Razmik Mirzoyan , Boris Anatolievich Dolgoshein , Sergey Nikolaevich Klemin , Elena Viktorovna Popova , Leonid Anatolievich Filatov
- Applicant Address: DE Munich RU Moscow
- Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften E.V.,Boris Anatolievich Dolgoshein
- Current Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften E.V.,Boris Anatolievich Dolgoshein
- Current Assignee Address: DE Munich RU Moscow
- Agency: Porter, Wright, Morris & Arthur, LLP
- Priority: RU2004113616 20040505
- International Application: PCT/RU2005/000242 WO 20050505
- International Announcement: WO2005/106971 WO 20051110
- Main IPC: H01J40/14
- IPC: H01J40/14

Abstract:
The invention relates to high-efficient light-recording detectors and can be used for nuclear and laser engineering, and in technical and medical tomography etc.The inventive silicon photoelectric multiplier (variant 1) comprising a p++ type conductivity substrate whose dope additive concentration ranges from 1018 to 1020 cm −3 and which consists of cells, each of which comprises a p− type conductivity epitaxial layer whose dope additive concentration is gradually changeable from 1018 to 1014 cm−3 and which is grown on the substrate, a p− type conductivity layer whose dope additive concentration ranges from 1015 to 1017 cm−3 and a n+ type conductivity layer whose dope additive concentration ranges from 1018 to 1020 cm−3, wherein a polysilicon resistor connecting the n+ type conductivity layer with a feed bar is arranged in each cell on a silicon oxide layer and separating elements are disposed between the cells. Said silicon photoelectric multiplier (variant 2) comprising a n− type conductivity substrate to which a p++-type conductivity whose dope additive concentration ranges from 1018-1020 cm−3 is applied and consists of cells, wherein in each cell a polysilicon resistor is placed on a silicon oxide layer and separating elements are disposed between the cells.
Public/Granted literature
- US20080251692A1 Silicon Photoelectric Multiplier (Variants) and a Cell for Silicon Photoelectric Multiplier Public/Granted day:2008-10-16
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