Invention Grant
- Patent Title: Methodology for bias temperature instability test
- Patent Title (中): 偏置温度不稳定性试验方法
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Application No.: US12252904Application Date: 2008-10-16
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Publication No.: US07759962B2Publication Date: 2010-07-20
- Inventor: Jiaw-Ren Shih , Neeraj Kumar Jha , Rakesh Ranjan , Naresh Kumar Emani
- Applicant: Jiaw-Ren Shih , Neeraj Kumar Jha , Rakesh Ranjan , Naresh Kumar Emani
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: G01R31/26
- IPC: G01R31/26

Abstract:
A method for performing a bias temperature instability test on a device includes performing a first stress on the device. After the first stress, a first measurement is performed to determine a first parameter of the device. After the first measurement, a second stress is performed on the device, wherein only the first parameter is measured between the first stress and the second stress. The method further includes performing a second measurement to determine a second parameter of the device after the second stress. The second parameter is different from the first parameter.
Public/Granted literature
- US20100097091A1 Methodology for Bias Temperature Instability Test Public/Granted day:2010-04-22
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