发明授权
- 专利标题： Aspheric lens surface-decenter measuring method and apparatus
- 专利标题（中）： 非球面透镜表面分散测量方法和装置
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申请号： US12047580申请日： 2008-03-13
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公开(公告)号： US07760365B2公开(公告)日： 2010-07-20
- 发明人: Nobuaki Ueki
- 申请人： Nobuaki Ueki
- 申请人地址： JP Saitama-shi
- 专利权人： FUJINON Corporation
- 当前专利权人： FUJINON Corporation
- 当前专利权人地址： JP Saitama-shi
- 代理机构： Birch, Stewart, Kolasch & Birch, LLP
- 优先权： JPP2007-089308 20070329
- 主分类号： G01B11/02
- IPC分类号： G01B11/02
摘要：
A relationship between surface decenter of a lens 1 under test and surface-decenter comatic aberration and a relationship between surface tilt of the lens 1 under test and surface-tilt comatic aberration are calculated by computer simulation. The surface tilt of the lens 1 under test is calculated by measuring a transmissive wavefront of a projecting portion 3, and comatic aberration of the lens 1 under test is calculated by measuring a transmissive wavefront of a lens portion 2. The surface-decenter comatic aberration that occurs due to the surface decenter is calculated by subtracting the surface-tilt comatic aberration from the calculated comatic aberration. The surface decenter of the lens 1 under test is calculated based on the calculated surface-decenter comatic aberration.
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