发明授权
US07765020B2 Graphical user interface for presenting multivariate fault contributions
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用于呈现多变量故障贡献的图形用户界面
- 专利标题: Graphical user interface for presenting multivariate fault contributions
- 专利标题(中): 用于呈现多变量故障贡献的图形用户界面
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申请号: US11800462申请日: 2007-05-04
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公开(公告)号: US07765020B2公开(公告)日: 2010-07-27
- 发明人: Y. Sean Lin , Alexander T. Schwarm
- 申请人: Y. Sean Lin , Alexander T. Schwarm
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; G06F11/00
摘要:
Methods and apparatuses for presenting multivariate fault contributions in a user interface are described. A user interface is provided to illustrate a fault for a sample manufactured by a process containing multiple variables, each having at least two components. The user interface presents one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis and graphically illustrates contributions to the fault associated with the multiple variables by associating a contribution of each component in the one group of components of the multiple variables to each corresponding component in the second group of components of the multiple variables.
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