Invention Grant
- Patent Title: Vacuum measuring cell with membrane
- Patent Title (中): 带膜的真空测量池
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Application No.: US12097830Application Date: 2006-11-23
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Publication No.: US07765874B2Publication Date: 2010-08-03
- Inventor: Martin Wüest
- Applicant: Martin Wüest
- Applicant Address: CH Bad Ragaz
- Assignee: Inficon GmbH
- Current Assignee: Inficon GmbH
- Current Assignee Address: CH Bad Ragaz
- Agency: Notaro, Michalos & Zaccaria P.C.
- Priority: CH69/06 20060118
- International Application: PCT/CH2006/000656 WO 20061123
- International Announcement: WO2007/082395 WO 20070726
- Main IPC: G01L7/08
- IPC: G01L7/08
Abstract:
A vacuum measuring cell with a membrane between two planar housing parts has a first housing part forming a reference vacuum volume and the second housing part forming a measuring vacuum volume with a connection for the medium to be measured and a mechanism for measuring the membrane deflection. The membrane surface exposed to the medium to be measured is a structured surface.
Public/Granted literature
- US20080307890A1 Vacuum Measuring Cell with Membrane Public/Granted day:2008-12-18
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