Invention Grant
- Patent Title: High temperature capacitive static/dynamic pressure sensors
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Application No.: US12215735Application Date: 2008-06-30
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Publication No.: US07765875B2Publication Date: 2010-08-03
- Inventor: Shuwen Guo
- Applicant: Shuwen Guo
- Applicant Address: US MN Burnsville
- Assignee: Rosemount Aerospace Inc.
- Current Assignee: Rosemount Aerospace Inc.
- Current Assignee Address: US MN Burnsville
- Agency: Edwards Angell Palmer & Dodge LLP
- Agent Scott D. Wofsy
- Main IPC: G01L9/12
- IPC: G01L9/12

Abstract:
Disclosed is a capacitive pressure probe for high temperature applications, such as for use in a gas turbine engine. The capacitive probe or pressure sensor of the present invention includes, inter alia, a sensor housing that defines an interior sensing chamber having a pressure port and an interior reference chamber positioned adjacent to a sensing electrode. The reference chamber is separated from the sensing chamber by a deflectable diaphragm made from Haynes 230 alloy, wherein the deflection of the diaphragm in response to an applied pressure in the sensing chamber corresponds to a change in capacitance value detected by the sensing electrode.
Public/Granted literature
- US20100000326A1 High temperature capacitive static/dynamic pressure sensors Public/Granted day:2010-01-07
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