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US07765880B2 Flexible piezoresistive interfacial shear and normal force sensor and sensor array 有权
灵活的压阻界面剪切和法向力传感器和传感器阵列

Flexible piezoresistive interfacial shear and normal force sensor and sensor array
Abstract:
A force sensor includes a polymeric substrate including a cavity with a tilt plane, at least two metal piezoresistors on the tilt plane, and a contact pad connected to the metal piezoresistors. The tilt plane may include a measured interface of from 15° to 75°.
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