Invention Grant
US07766464B2 Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus
失效
压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备
- Patent Title: Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus
- Patent Title (中): 压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备
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Application No.: US12070737Application Date: 2008-02-21
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Publication No.: US07766464B2Publication Date: 2010-08-03
- Inventor: Motohisa Noguchi , Eiju Hirai
- Applicant: Motohisa Noguchi , Eiju Hirai
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2004-017108 20040126
- Main IPC: B41J2/45
- IPC: B41J2/45 ; H01L41/00
Abstract:
A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
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