Invention Grant
US07767129B2 Imprint templates for imprint lithography, and methods of patterning a plurality of substrates
有权
用于压印光刻的印刷模板,以及图案化多个基板的方法
- Patent Title: Imprint templates for imprint lithography, and methods of patterning a plurality of substrates
- Patent Title (中): 用于压印光刻的印刷模板,以及图案化多个基板的方法
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Application No.: US11127942Application Date: 2005-05-11
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Publication No.: US07767129B2Publication Date: 2010-08-03
- Inventor: Gurtej S. Sandhu , Randal W. Chance
- Applicant: Gurtej S. Sandhu , Randal W. Chance
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: B24B33/055
- IPC: B24B33/055 ; B29C59/00 ; H01L27/00

Abstract:
The invention comprises methods of patterning a plurality of substrates, and imprint templates used in imprint lithography. In one implementation, a method of patterning a plurality of substrates includes providing an imprint template having a plurality of spaced features. A first substrate is imprinted with the imprint template effective to form a plurality of recesses into the first substrate from the spaced features. After imprinting the first substrate, an elevationally outermost portion of the spaced features is removed effective to reduce elevation of the spaced features. After the removing, a second substrate is imprinted with the imprint template using the elevation-reduced spaced features effective to form a plurality of recesses into the second substrate from the elevation-reduced spaced features. Other aspects and implementations are contemplated.
Public/Granted literature
- US20060255505A1 Imprint templates for imprint lithography, and methods of patterning a plurality of substrates Public/Granted day:2006-11-16
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