Invention Grant
- Patent Title: Methods for photo-processing photo-imageable material
- Patent Title (中): 照片处理可光成像材料的方法
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Application No.: US11166558Application Date: 2005-06-24
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Publication No.: US07767363B2Publication Date: 2010-08-03
- Inventor: Pary Baluswamy
- Applicant: Pary Baluswamy
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
The invention includes methods for photo-processing photo-imageable material. Locations of the photo-imageable material where flare hot spots are expected to occur are ascertained. A substantially uniform dose of light intensity is provided to at least the majority of the photo-imageable material other than the hot spot locations, and is not provided to the hot spot locations. The provision of the substantially uniform dose of light intensity can occur during formation of a primary pattern in the photo-imageable material with a reticle, utilizing the same reticle as that used for making the primary pattern; or can occur at a separate processing stage than that utilized for forming the primary pattern and with a separate reticle from that utilized to form the primary pattern. The invention also includes reticle constructions which can be utilized for photo-processing of photo-imageable material.
Public/Granted literature
- US20060292456A1 Reticle constructions, and methods for photo-processing photo-imageable material Public/Granted day:2006-12-28
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