Invention Grant
- Patent Title: Method for producing resist composition and resist composition
- Patent Title (中): 抗蚀剂组合物和抗蚀剂组合物的制造方法
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Application No.: US11718388Application Date: 2005-11-04
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Publication No.: US07767378B2Publication Date: 2010-08-03
- Inventor: Hiroaki Shimizu , Masaru Takeshita
- Applicant: Hiroaki Shimizu , Masaru Takeshita
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: JP2004-322315 20041105
- International Application: PCT/JP2005/020291 WO 20051104
- International Announcement: WO2006/049246 WO 20060511
- Main IPC: G03F7/039
- IPC: G03F7/039

Abstract:
A method for producing a resist composition including a resin component (A) that exhibits changed alkali solubility under the action of acid and an acid generator component (B) that generates acid upon exposure, the method including the steps of: obtaining the component (A) by mixing a plurality of copolymers, which are composed of the same structural units but have mutually different measured values for the contact angle.
Public/Granted literature
- US20090029288A1 METHOD FOR PRODUCING RESIST COMPOSITION AND RESIST COMPOSITION Public/Granted day:2009-01-29
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