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US07767378B2 Method for producing resist composition and resist composition 有权
抗蚀剂组合物和抗蚀剂组合物的制造方法

Method for producing resist composition and resist composition
Abstract:
A method for producing a resist composition including a resin component (A) that exhibits changed alkali solubility under the action of acid and an acid generator component (B) that generates acid upon exposure, the method including the steps of: obtaining the component (A) by mixing a plurality of copolymers, which are composed of the same structural units but have mutually different measured values for the contact angle.
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