Invention Grant
- Patent Title: Method of manufacturing a thin film transistor array panel
- Patent Title (中): 制造薄膜晶体管阵列面板的方法
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Application No.: US11969386Application Date: 2008-01-04
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Publication No.: US07767477B2Publication Date: 2010-08-03
- Inventor: Tae-Young Choi
- Applicant: Tae-Young Choi
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2005-0026015 20050329
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for manufacturing a flexible display, includes forming a gate line including a plurality of gate electrodes with a first interval on a substrate having a coefficient of thermal expansion, sequentially depositing both a gate insulating layer covering the gate line and a semiconductor layer, etching the semiconductor layer by using a mask having a plurality of semiconductor patterns with a second interval different from the first interval to form a semiconductor, forming both a data line including a source electrode and a drain electrode on the semiconductor and the gate insulating layer, and forming a pixel electrode coupled with the drain electrode.
Public/Granted literature
- US20080131985A1 METHOD OF MANUFACTURING A THIN FILM TRANSISTOR ARRAY PANEL Public/Granted day:2008-06-05
Information query
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