Invention Grant
- Patent Title: Three dimensional strained quantum wells and three dimensional strained surface channels by Ge confinement method
- Patent Title (中): 三维应变量子阱和三维应变表面通道的Ge约束法
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Application No.: US11864963Application Date: 2007-09-29
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Publication No.: US07767560B2Publication Date: 2010-08-03
- Inventor: Been-Yih Jin , Robert S. Chau , Brian S. Doyle , Jack T. Kavalieros
- Applicant: Been-Yih Jin , Robert S. Chau , Brian S. Doyle , Jack T. Kavalieros
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Grossman, Tucker, Perreault & Pfleger, PLLC
- Main IPC: H01L21/36
- IPC: H01L21/36 ; H01L21/20

Abstract:
The present disclosure describes a method and apparatus for implementing a 3D (three dimensional) strained high mobility quantum well structure, and a 3D strained surface channel structure through a Ge confinement method. One exemplary apparatus may include a first graded SiGe fin on a Si substrate. The first graded SiGe fin may have a maximum Ge concentration greater than about 60%. A Ge quantum well may be on the first graded SiGe fin and a SiGe quantum well upper barrier layer may be on the Ge quantum well. The exemplary apparatus may further include a second graded SiGe fin on the Si substrate. The second graded SiGe fin may have a maximum Ge concentration less than about 40%. A Si active channel layer may be on the second graded SiGe fin. Other high mobility materials such as III-V semiconductors may be used as the active channel materials. Of course, many alternatives, variations and modifications are possible without departing from this embodiment.
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