Invention Grant
US07767866B2 Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use
有权
含氟链烷醇的烯烃单体的前体，以及相关的合成和使用方法
- Patent Title: Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use
- Patent Title (中): 含氟链烷醇的烯烃单体的前体，以及相关的合成和使用方法
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Application No.: US12402680Application Date: 2009-03-12
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Publication No.: US07767866B2Publication Date: 2010-08-03
- Inventor: Gregory Breyta , Richard Anthony DiPietro , Daniel Joseph Dawson
- Applicant: Gregory Breyta , Richard Anthony DiPietro , Daniel Joseph Dawson
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Bozicevic, Field & Francis LLP
- Agent Isaac M. Rutenberg
- Main IPC: C07C31/20
- IPC: C07C31/20 ; C07C31/27
Abstract:
The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
Public/Granted literature
- US20090177017A1 Precursors to Fluoroalkanol-Containing Olefin Monomers, and Associated Methods of Synthesis and Use Public/Granted day:2009-07-09
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