Invention Grant
- Patent Title: Verification of a ground connection fabrication process for ESD resistors in magnetic heads
- Patent Title (中): 验证磁头中ESD电阻的接地连接制造工艺
-
Application No.: US11965479Application Date: 2007-12-27
-
Publication No.: US07768268B2Publication Date: 2010-08-03
- Inventor: Satoru Araki , Robert S. Beach , David J. Seagle
- Applicant: Satoru Araki , Robert S. Beach , David J. Seagle
- Applicant Address: NL Amsterdam
- Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
- Current Assignee: Hitachi Global Storage Technologies Netherlands, B.V.
- Current Assignee Address: NL Amsterdam
- Agency: Duft Bornsen & Fishman, LLP
- Main IPC: G01R31/14
- IPC: G01R31/14 ; G01R31/26 ; G11B5/127

Abstract:
Test methods and components are disclosed for testing the quality of the ground connection fabrication process for ESD shunt resistors in magnetic heads. A wafer is populated with one or more test components along with magnetic heads. The test components are fabricated with ESD shunt resistor ground connections created by the same or similar process used to fabricate the ESD shunt resistor ground connections in magnetic heads on the wafer. The resistance of the test component ground connections may then be measured in order to determine the quality of the ground connections formed by the fabrication process. The quality of the ground connection fabrication process may then be determined based on the measured resistance of the test components.
Public/Granted literature
- US20090168213A1 VERIFICATION OF A GROUND CONNECTION FABRICATION PROCESS FOR ESD RESISTORS IN MAGNETIC HEADS Public/Granted day:2009-07-02
Information query