Invention Grant
US07768284B2 Test apparatus for testing a semiconductor device, and method for testing the semiconductor device
有权
用于测试半导体器件的测试装置,以及用于测试半导体器件的方法
- Patent Title: Test apparatus for testing a semiconductor device, and method for testing the semiconductor device
- Patent Title (中): 用于测试半导体器件的测试装置,以及用于测试半导体器件的方法
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Application No.: US10598052Application Date: 2005-02-09
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Publication No.: US07768284B2Publication Date: 2010-08-03
- Inventor: Horst Groeninger
- Applicant: Horst Groeninger
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Dicke, Billig & Czaja, PLLC
- Priority: DE102004007696 20040216
- International Application: PCT/DE2005/000216 WO 20050209
- International Announcement: WO2005/078460 WO 20050825
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/26

Abstract:
A test apparatus for testing a semiconductor device having contact pads on its top and its back, and to a method for testing the semiconductor device is disclosed. In one embodiment, the test apparatus has a test socket which is mounted on a test printed circuit board. Internal through-contact elements of the test socket can be used to test contact pads on the top of the semiconductor device. The contact pads on the back of the semiconductor device can be connected for the purpose of testing the semiconductor device using external through-contact elements which are arranged outside of the locating seat.
Public/Granted literature
- US20080315899A1 Test Apparatus for Testing a Semiconductor Device, and Method for Testing the Semiconductor Device Public/Granted day:2008-12-25
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