发明授权
- 专利标题: Optical assembly, projection exposure apparatus and projection objective
- 专利标题(中): 光学组件,投影曝光装置和投影物镜
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申请号: US12143322申请日: 2008-06-20
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公开(公告)号: US07768721B2公开(公告)日: 2010-08-03
- 发明人: Jochen Weber , Erich Merz , Ole Fluegge , Kai-Uwe Berroth , Cornelia Buehler , Markus Hauf
- 申请人: Jochen Weber , Erich Merz , Ole Fluegge , Kai-Uwe Berroth , Cornelia Buehler , Markus Hauf
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102007029329 20070622
- 主分类号: G02B7/02
- IPC分类号: G02B7/02
摘要:
In some embodiments, the disclosure relates to an optical assembly that includes an optical element and a structure element. A gap runs between the optical element and the structure element. A sealing element may be present to seal the gap. At least one liquid layer may be arranged between the structure element and/or the optical element, and the sealing element so that a relative displacement of the sealing element with respect to the structure element and/or the optical element is possible in the direction of the layer plane.
公开/授权文献
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |