发明授权
US07771911B2 Process for producing photoresist composition, filter, coater and photoresist composition 有权
光致抗蚀剂组合物,过滤器,涂布机和光致抗蚀剂组合物的制造方法

Process for producing photoresist composition, filter, coater and photoresist composition
摘要:
A technique to acquire a photoresist composition which can reduce occurrence of defects of a resist pattern after development is provided. Further, a technique to obtain a photoresist composition having excellent storage stability characteristics as a resist solution (storage stability); and a technique to obtain a photoresist composition which reduces the change of sensitivity and resist pattern size after treatment almost completely are provided. A photoresist composition containing a resin component (A), an acid-generating component (B) for generating an acid under exposure, and an organic solvent (C) is passed through a first filter 2a equipped with a first membrane having zeta potential of more than −20 mV but no more than 15 mV in distilled water of pH 7.0.
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