Invention Grant
US07774086B2 Substrate thickness measuring during polishing 有权
抛光时的基板厚度测量

Substrate thickness measuring during polishing
Abstract:
A computer program product that determines a polishing endpoint includes obtaining spectra from different zones on a substrate during different times in a polishing sequence, matches the spectra with indexes in a library and uses the indexes to determining a polishing rate for each of the different zones from the indexes. An adjusted polishing rate can be determined for one of the zones, which causes the substrate to have a desired profile when the polishing end time is reached.
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